Optical: systems and elements – Lens – With reflecting element
Patent
1996-04-05
1997-11-18
Nelms, David C.
Optical: systems and elements
Lens
With reflecting element
359732, 359733, G02B 1700
Patent
active
056893779
ABSTRACT:
A catadioptric optical system includes a first imaging optical system forming an intermediate image of a pattern provided on a first surface with a reduced magnification, including a first lens group with a positive refracting power and a second lens group which includes a concave mirror having a negative lens component. The system also includes a second image optical system forming an image of the intermediate image upon a second surface, a combined magnification of the first and second imaging optical systems being a reduction magnification. The system further includes a deflecting member disposed in an optical path from the first imaging system to the second imaging system so as to guide light from the first imaging system to the second imaging system.
REFERENCES:
patent: 4171871 (1979-10-01), Dill et al.
patent: 4779966 (1988-10-01), Friedman
patent: 5052763 (1991-10-01), Singh et al.
patent: 5220454 (1993-06-01), Ichihara et al.
patent: 5289312 (1994-02-01), Hashimoto et al.
patent: 5323263 (1994-06-01), Schoenmakers
patent: 5402267 (1995-03-01), Furter et al.
patent: 5559629 (1996-09-01), Sheets et al.
Cornely John P.
Nelms David C.
Nikon Corporation
LandOfFree
Catadioptric optical system and exposure apparatus having the sa does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Catadioptric optical system and exposure apparatus having the sa, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Catadioptric optical system and exposure apparatus having the sa will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1569886