Catadioptric objective

Details Catadioptric objective Catadioptric objective

2011-07-26

2011-07-26

Thompson, Timothy J (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C359S727000, C359S729000, C359S731000, C359S364000, C359S728000

Reissue Patent

active

RE042570

ABSTRACT:
An aspheric reduction objective has a catadioptric partial objective (L1), an intermediate image (IMI) and a refractive partial objective (L2). The catadioptric partial objective has an assembly centered to the optical axis and this assembly includes two mutually facing concave mirrors (M1,M2). The cutouts in the mirrors (B1,B2) lead to an aperture obscuration which can be held to be very small by utilizing lenses close to the mirrors and having a high negative refractive power and aspheric lens surfaces (27, 33). The position of the entry and exit pupils can be corrected with aspherical lens surfaces (12, 48, 53) in the field lens groups. The number of spherical lenses in the refractive partial objective can be reduced with aspherical lens surfaces (66, 78) arranged symmetrically to the diaphragm plane. Neighboring aspheric lens surfaces (172, 173) form additional correction possibilities.

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