1990-09-24
1991-07-16
Arnold, Bruce Y.
350442, 350444, 350446, G02B 1708, G02B 1314
Patent
active
050319760
ABSTRACT:
An improved catadioptric imaging system is presented which produces a flat accessible final image, and is particularly effective at high speed in the deep ultraviolet spectral range. The lenses of the system are formed from a single glass type, fused silica. A first group of lenses serves as an aberration corrector group. A single focusing lens focuses light, transmitted through the corrector group, forming an intermediate image at a predetermined position within the system. A separate field lens is placed at the intermediate image point, and focuses the light transmitted thereto through a hole in the center of a spherical mirror. The light then travels through a separate thick lens element and is subsequently reflected by a planar mirror back through the thick lens and towards the concave reflective side of the spherical mirror. The spherical mirror thereafter reflects this incident light, focusing it through a hole in the center of the planar mirror and to a final imaging point outside of the system.
REFERENCES:
patent: 3296443 (1967-01-01), Argyle
patent: 3371212 (1968-02-01), Weiss
patent: 3927254 (1975-12-01), Lessman
patent: 4411499 (1983-10-01), Abel et al.
patent: 4432596 (1984-02-01), Campbell et al.
patent: 4779966 (1988-10-01), Friedman
Arnold Bruce Y.
KLA Instruments Corporation
Lerner Martin
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