Cata-dioptric reduction projection optical system

Details Cata-dioptric reduction projection optical system Cata-dioptric reduction projection optical system

1992-09-24

1993-06-15

Lerner, Martin

Optical: systems and elements

Polarization without modulation

Polarizarion by dichroism

359495, 359727, 359732, G02B 1708, G02B 2728

Patent

active

052204545

ABSTRACT:
In a cata-dioptric optical system having a combination of a reflection system and a refraction system for reduction-projecting an object on a first plane onto a second plane, a polarization beam splitter and a quarter wavelength plate are provided to split the incident light and the reflected light. The light beam directed to the polarization beam splitter is converted to a substantially collimated light beam by a first group of lenses. A second group of lenses are arranged between the polarization beam splitter and a concave reflection mirror to diverge the light beam. The light reflected by the concave reflection mirror is directed back to the polarization beam splitter with a substantially collimated state by the second group of lenses. The light beam from the second group of lenses transmitted through the polarization beam splitter is focused by a third group of lenses having a positive refraction power to form a reduced image.

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