Measuring and testing – Fluid pressure gauge – With protective separator
Patent
1986-04-22
1988-03-22
Pellinen, A. D.
Measuring and testing
Fluid pressure gauge
With protective separator
73715, 73754, 73DIG4, 338 4, 338 42, G01L 708
Patent
active
047320427
ABSTRACT:
A solid state semiconductor pressure sensor is described in which the pressure sensor element is protected from the ambient whose pressure is being measured by a combination of a pressure transfer medium and a thin covering membrane. A method is described for applying the thin covering membrane so as to substantially avoid entrapment of air or formation of voids in the pressure transfer medium which would degrade the performance of the sensor. The pressure transfer medium is a gel-like material such as a silicone rubber. The membrane is chosen to be substantially impermeable to the ambients being measured and sufficiently flexible to avoid attenuation of the input pressure signal. The membrane is cast in place by applying a thin liquid coating or a heat deformable film over the pressure transfer medium and then converting it into a thin solid membrane stuck to the pressure transfer medium and the pressure sensor body.
REFERENCES:
patent: 2569987 (1951-10-01), Frondel
patent: 3405559 (1968-10-01), Moffatt
patent: 3619742 (1971-11-01), Rud, Jr.
patent: 3808480 (1974-04-01), Johnston
patent: 3943915 (1976-03-01), Severson
patent: 4314480 (1982-02-01), Becker
patent: 4367651 (1983-01-01), Cameron et al.
patent: 4565096 (1986-01-01), Knecht
Handy Robert M.
Motorola Inc.
Pellinen A. D.
Williams H. L.
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