Cassette unit and fixture for loading the unit with a planar mem

Details Cassette unit and fixture for loading the unit with a planar mem Cassette unit and fixture for loading the unit with a planar mem

1977-12-14

1979-07-03

Kilgore, Robert M.

Registers

Coded record sensors

Holding devices

235453, G06K 700, G06K 704, G06K 1316

Patent

active

041597990

ABSTRACT:
In fabricating very-high-resolution devices with a lithographic tool such as an EBES machine, it is crucial that the planar mask or wafer members utilized therein be loaded into and maintained in the work chamber of the machine in a way that minimally affects their planarity. In accordance with the present invention this is accomplished by loading each member into a three-point-suspension cassette unit by means of a fixture that performs the loading in a precise and essentially stress-free manner.

REFERENCES:
patent: 3530448 (1970-09-01), Clancy
patent: 3534397 (1970-10-01), McWade
patent: 3790758 (1974-02-01), Tanigawa
patent: 3959623 (1976-05-01), Nakahara
patent: 4036430 (1977-07-01), Eppich
patent: 4087680 (1978-05-01), Mack

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