Supports: racks – Special article – Platelike
Patent
1995-12-14
1999-01-05
Chin-Shue, Alvin C.
Supports: racks
Special article
Platelike
211 4112, A47F 700
Patent
active
058552804
ABSTRACT:
An apparatus for the convenient viewing of scribed numbers upon selected wafers is disclosed. The apparatus supports a wafer cassette and raises predetermined wafers and illuminates the identification numbers scribed thereon.
REFERENCES:
patent: 4569452 (1986-02-01), Schulke
patent: 5193682 (1993-03-01), Naito et al.
patent: 5417767 (1995-05-01), Stinson
patent: 5538230 (1996-07-01), Sibley
Chin-Shue Alvin C.
Lucent Technologies - Inc.
Purol Sarah L.
Rehberg John T.
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