Material or article handling – Device for emptying portable receptacle – Nongravity type
Patent
1993-07-16
1995-08-22
Oberleitner, Robert J.
Material or article handling
Device for emptying portable receptacle
Nongravity type
312327, 29743, 414940, B65G 2102, A47B 8800
Patent
active
054433487
ABSTRACT:
A cassette input/output unit handles cassettes which contain semiconductor wafers or other substrates that are to be delivered to or withdrawn from a semiconductor processing system. The input/output unit includes a drawer front which rotates 90.degree. about a horizontal axis as it is opened. Thus a cassette containing wafers can easily be placed on the drawer front with the wafers oriented vertically, as they are normally carried, and the cassette will be rotated 90.degree. as the drawer is closed, thereby orienting the wafers horizontally for access by a robot inside the photolithography system. The cassette may also be rotated about a vertical axis within the unit, so that several input/output units may be used with a robot which rotates about a fixed axis. A clamping mechanism grips the cassette firmly when it is placed in the unit.
REFERENCES:
patent: 762888 (1904-06-01), Decker
patent: 2165122 (1939-07-01), Ashbery
patent: 3788719 (1974-01-01), Whited
patent: 3854605 (1974-12-01), Proper
patent: 4744715 (1988-05-01), Kawabata
patent: 5048164 (1991-09-01), Harima
Biche Michael R.
Lurye Alexander
Johnson R. B.
Oberleitner Robert J.
Semiconductor Systems, Inc.
Steuber David E.
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