Cassette elevator for use in a modular article processing machin

Details Cassette elevator for use in a modular article processing machin Cassette elevator for use in a modular article processing machin

1984-03-09

1989-08-29

Bucci, David A.

Material or article handling

Elevator or hoist and loading or unloading means therefor

Tilting carrier

414331, 414656, B65G 6924

Patent

active

048612227

ABSTRACT:
Improved handling of multi-wafer cassettes in automated wafer processing machines is accomplished by means of an improved cassette elevator. The design of the cassette elevator is such that the receiver/sender portion of the wafer processing machine can be easily configured to accommodate single or multiple cassette elevators served by a single wafer loading spatula without increasing the width of the receiver/sender units. In addition, an automatic tilt feature of the cassette elevator substantially reduces the likelihood of wafer breakage during the cassette loading and unloading operation.

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