Casing for frame-supported pellicles

Details Casing for frame-supported pellicles Casing for frame-supported pellicles

1995-09-26

1996-11-26

Foster, Jimmy G.

Special receptacle or package

For plate or sheet

Fragile or sensitive

2063161, 206719, B65D 8118

Patent

active

055776108

ABSTRACT:
Proposed is a novel casing for frame-supported pellicle used for dustproof protection of a photomask in the photolithographic patterning process for the manufacture of fine electronic devices. Different from conventional casings made from a plastic resin, the casing of the invention is characterized by the use of a unique permanently antistatic resin composition which is a resin blend consisting of 80-95% by weight of an ABS or acrylic resin and 20-5% by weight of a specific hydrophilic polymer. By virtue of the excellent antistatic behavior of the resin composition, the frame-supported pellicle encased in the casing is safe from the troubles due to deposition of dust particles during transportation and from contamination by the vaporized matter from the casing.

REFERENCES:
patent: 4470508 (1984-09-01), Yen
patent: 4511038 (1985-04-01), Miller et al.
patent: 4697701 (1987-10-01), Ying
patent: 5042655 (1991-08-01), Beldyk et al.
patent: 5168993 (1992-12-01), Yen
patent: 5305878 (1994-04-01), Yen
patent: 5330053 (1994-07-01), Tabuchi et al.
patent: 5353934 (1994-10-01), Yamauchi
patent: 5399398 (1995-03-01), Toshimitsu et al.

Affiliated with

Also associated with

Rating

Casing for frame-supported pellicles does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Casing for frame-supported pellicles, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Casing for frame-supported pellicles will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1966718