Case for photomask

Details Case for photomask Case for photomask

1993-07-07

1994-07-19

Fidei, David T.

Special receptacle or package

For plate or sheet

Fragile or sensitive

206454, 206594, B65D 8548

Patent

active

053300530

ABSTRACT:
The present invention relates to a case for a photomask to prevent generation of dust which might attach to and stain a photomask or the photomask pellicle. In a case for a photomask comprising a case main unit with an upper opening for accommodating the photomask and a lid for the opening of the case main unit, cushion materials are provided on the inner bottom of the case main unit and on the inner ceiling of the lid. The photomask is elastically squeezed between the cushion materials when accommodated. Thus, shaking and rattling during transportation are prevented to minimize the generation of dust. As the cushion material, a rubber material having a smooth surface on one side and a coarse surface on the other side is used.

REFERENCES:
patent: 2327713 (1943-08-01), Hunter
patent: 3768393 (1973-10-01), Betz et al.
patent: 3792771 (1974-02-01), Bonjean
patent: 3948436 (1976-04-01), Bambara
patent: 4470508 (1984-09-01), Yen
patent: 4511038 (1985-04-01), Miller et al.
patent: 4574950 (1986-03-01), Koe et al.
patent: 4700844 (1987-10-01), Griffith
patent: 4830182 (1989-05-01), Nakazato et al.
patent: 4899880 (1990-02-01), Carter

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