Cascaded planar exposure chamber

Details Cascaded planar exposure chamber Cascaded planar exposure chamber

2005-05-03

2005-05-03

Van, Quang T. (Department: 3742)

Electric heating

Microwave heating

Tunnel furnace

C219S696000

Reexamination Certificate

active

06888115

ABSTRACT:
A device for heating relatively wide planar materials is formed by at least two parallel waveguides. Each waveguide has an opening that forms a single opening for a planar material. The planar material is propelled in a direction parallel to the propagation of an electronic wave. If each waveguide is kept in TE mode, heating is uniform across the planar material. Power splitters, septums, tuning stubs, and impedance matching can be used to control the heating in each waveguide.

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