Cascaded inert gas purging system

Electricity: conductors and insulators – With fluids or vacuum – Boxes and housings

Reexamination Certificate

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Details

C174S0170VA

Reexamination Certificate

active

06855882

ABSTRACT:
The present invention is a system for protecting, for example, electronic, mechanical, or other components from contamination in a processing environment and includes a distribution manifold, a pressurized fluid in fluid communication with the manifold, and a plurality of apparatuses, such as sensors, which are connected to the manifold by respective conduits throughwhich the pressurized fluid flows to maintain a positive pressure at each of the apparatuses to prevent the processing environment from contacting the plurality of apparatus.

REFERENCES:
patent: 5101710 (1992-04-01), Baucom
patent: 5603892 (1997-02-01), Grilletto et al.
patent: 5888401 (1999-03-01), Nguyen
patent: 6075204 (2000-06-01), Celauro et al.
patent: 6459036 (2002-10-01), Celauro

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