Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1988-11-23
1990-08-14
Niebling, John F.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
204165, 204168, 204169, 427 34, 427 41, 427423, 21912148, 2191215, 21912151, 21912152, 21912159, C23C 1412, C23C 1428, H05H 134, H05H 142
Patent
active
049484850
ABSTRACT:
The present invention is directed to an arrangement of cascade arc plasma torches in a process for plasma polymerization. The arrangement is utilized in low temperature plasma polymerization coating and utilizes a plasma reactor with concentric electroconductive rings separated by insulator rings. The rings are positioned between electrode connectors and form a central passage through the plasma reactor. A voltage supply source provides a voltage across the plasma reactor so as to initiate and continue the polymerization coating process. Downstream of the plasma reactor, an arrangement is provided by which monomeric gas is fed into a passage at a downstream end of the reactor so as to enable plasma polymerization.
REFERENCES:
patent: 3010009 (1961-11-01), Ducati
patent: 4596718 (1986-06-01), Gruner
patent: 4670290 (1987-06-01), Itoh et al.
Calcote, Plasma Deposition of Amorphous Silicon, NASA Tech. Briefs, Spring 1981, p. 42.
Wallsten Hans I.
Yasuda Hirotsugu K.
Niebling John F.
Plasmacarb Inc.
Ryser David G.
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