Cartridge excimer laser system

Details Cartridge excimer laser system Cartridge excimer laser system

1998-10-02

2000-04-25

Bovernick, Rodney

Coherent light generators

Particular active media

Gas

372 86, H01S 322, H01S 3223

Patent

active

06055259&

ABSTRACT:
A new cartridge excimer laser system and method for generating an excimer laser beam using the system are provided. The system utilizes a cartridge (10) which contains a halogen-noble gas mixture (19), electrodes (50, 60) having external electrical connections (30, 40), and assembly (20) for transmitting a laser beam output (400), and an external gas port (90). The cartridge (10) fits onto a receptacle (100) located within a receiving compartment (200) of the laser base (300) of the new system. The cartridge (10) is easily replaced by the system operator and is refurbished by the manufacturer when the gas mixture (19) therein is exhausted.

REFERENCES:
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patent: 4958356 (1990-09-01), Tanuma
patent: 5087388 (1992-02-01), Mahoney et al.
patent: 5181217 (1993-01-01), Sato et al.
patent: 5260961 (1993-11-01), Zhou et al.
patent: 5594753 (1997-01-01), Frey et al.

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