Carrying device for semiconductor wafers

Details Carrying device for semiconductor wafers Carrying device for semiconductor wafers

1997-01-31

1999-03-23

Keenan, James W.

Material or article handling

Article reorienting device

Orienter has article gripping means

414936, 414941, B65G 4907

Patent

active

058850546

ABSTRACT:
The present invention provides a carrying device for semiconductor wafers. By using a simply constructed stage, the semiconductor wafers can be precisely positioned and rotating semiconductor wafers can be reliably supported and, only one kind of wafer stage needs to be provided for semiconductor wafers of different diameters, allowing more flexibility. The carrying device for loading a semiconductor wafer into a wafer carrier or taking the semiconductor wafer from the wafer carrier includes a carrier station for receiving wafer carrier, carrying arms for carrying semiconductor wafer, and a wafer stage for receiving the wafer. The wafer stage has a supporting shaft and four supporting arms. The supporting shaft is horizontally rotatable and is elevatable. Each supporting arm is upwardly curved.

REFERENCES:
patent: 4682928 (1987-07-01), Foulke et al.
patent: 4770600 (1988-09-01), Ishikawa
patent: 4971512 (1990-11-01), Lee et al.
patent: 5054991 (1991-10-01), Kato
patent: 5188501 (1993-02-01), Tomita et al.
patent: 5566466 (1996-10-01), Hearne
patent: 5669644 (1997-09-01), Kaihotsu et al.
patent: 5669752 (1997-09-01), Moon

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