Carry device for fine movement

Details Carry device for fine movement Carry device for fine movement

1986-11-26

1988-08-23

Chaudhuri, Olik

Photocopying

Projection printing and copying cameras

Step and repeat

148DIG46, 148DIG102, 228 491, 2504911, 269 73, 350529, 350531, B23Q 318, B23Q 1608, B23Q 1612, B23K 3704

Patent

active

047664657

ABSTRACT:
A carriage for fine movement includes a stationary stage, a movable stage slidably provided thereon, a moving mechanism, coupled to the stationary and movable stages, for moving the movable stage relative to the stationary stage, wherein at least one of the stationary stage, movable stage and moving mechanism is of a fine ceramic material to prevent distortion and variation with time to enhance the abrasion resistance.

REFERENCES:
patent: 4126376 (1978-11-01), Gommel
patent: 4358198 (1982-09-01), Moriyama et al.
patent: 4492356 (1985-01-01), Taniguchi et al.
Bednorz et al., "Piezoelectric XY Translator" IBM Technical Discl. Bull. vol. 26 No. 10A 4/84.
Kingery et al., Introduction to Ceramics, John Wiley & Sons 1976.
Brinkmann-Micro Manipulators, Precision-Made Mechanical Positioners for Science and Industry.

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