Carrier unit of substrate transfer apparatus

Details Carrier unit of substrate transfer apparatus Carrier unit of substrate transfer apparatus

2011-05-17

2011-05-17

Rodríguez, Saúl J (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S411000

Reexamination Certificate

active

07942619

ABSTRACT:
In the present invention, a base43of a robot27is fixed to a fixing portion53of a frame divided body50.The base43allows force exerted from a robot main body27A to be transmitted to the fixing portion53of the frame divided body50.Contrary, the fixing portion53of the frame divided body50has rigidity which can prevent the force exerted from the base43of the robot27from being transmitted to a main body constituting member51.Accordingly, the base43of the robot27has only to possess a function for connecting the robot main body27A and the frame divided body50.Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body50can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.

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