Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1996-12-02
1998-05-19
Nguyen, Nam
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
20429811, 2041922, 118728, C23C 1434
Patent
active
057530912
ABSTRACT:
A carrier palette useful for receiving at least one of a plurality of disc-shaped substrates of optical storage media, wherein the carrier palette comprises one or a plurality of circular depression adapted to receive said substrates, and wherein the diameter of the depressions is greater than the diameter of the substrates to be received. The carrier palette can be used to produce optical storage media of improved climatic stability with minimal edge splintering.
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patent: 4735701 (1988-04-01), Allen et al.
patent: 5244555 (1993-09-01), Allen et al.
Fries Hartwig
Kueper Stephan
Schmidt Guenther
Weber Christoph
Hoechst Aktiengesellschaft
Nguyen Nam
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