Carrier for transferring plate-like objects one by one, a handli

Details Carrier for transferring plate-like objects one by one, a handli Carrier for transferring plate-like objects one by one, a handli

1988-11-04

1990-02-13

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

414416, G01R 3126

Patent

active

049010115

ABSTRACT:
A carrier for transferring a semiconductor wafer one by one includes a tray portion to load the wafer thereon the wafer submitted for processing, the tray portion having a groove which is formed therein for unloading the wafer therefrom, and mechanism for positioning the tray portion relative to a predetermined location of the drawer. A handling apparatus for the carrier includes a sampling case mounted to the frame of a wafer probing machine and having formed therein a first opening communicating with the outside of the machine and a second opening communicating with the interior of the machine, a drawer adapted to go into and come out of the case through the first opening and plural pairs of guide-rollers to guide the drawer between the first and second openings of the case. To take a sample from among the wafers in the machine, the carrier is loaded on the drawer, the carrier held on the drawer is pushed through the second opening into the case, wafer is picked out by a full-automatic transferring apparatus from a wafer storage, the wafer is inserted through the second opening into the case, the wafer is placed on the carrier by guiding it through the groove of the carrier and the drawer is pulled out.

REFERENCES:
patent: 4534389 (1985-09-01), Tullis
patent: 4755746 (1988-08-01), Mallory et al.
patent: 4759008 (1988-08-01), Hirano et al.
patent: 4797865 (1989-01-01), Imai et al.

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