Carrier for supporting workpiece to be polished

Details Carrier for supporting workpiece to be polished Carrier for supporting workpiece to be polished

1990-04-23

1992-02-04

Kisliuk, Bruce M.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

51129, 51133, B24B 500

Patent

active

050850091

ABSTRACT:
A carrier for supporting workpieces to be polished is composed of an integrated mica laminated sheet. The mica laminated sheet is impregnated with a thermo-setting resin. The carrier has a low warp ratio and can be made thin with a sufficient mechanical strength and accuracy of thickness.

REFERENCES:
patent: 4593495 (1986-06-01), Kawakami et al.
patent: 4739589 (1988-04-01), Brehm et al.
"Ultra-Precision Polishing & Mirror Polishing Technique", pp. 375-383, Keiei--Kaihatsu Center, Osaka, Japan, 1987, No Translation Has Been Provided.

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