Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Reexamination Certificate
2011-04-05
2011-04-05
Meeks, Timothy H (Department: 1712)
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
C427S249100, C427S249300, C427S249400, C427S249150, C427S249160, C427S255110, C427S255120, C427S255150, C427S255180, C427S255230, C427S255280
Reexamination Certificate
active
07919143
ABSTRACT:
A carrier for an object, preferably a substrate of a semiconductor component such as a wafer, includes a receiving element for the object and gas outlets arranged below the receiving element along the object received. At least sections of the carrier are made of a material which including stabilizing fibers and having a porosity which forms the gas outlets, in order to enable a desired gas to exit from the gas outlets in a dosed and finely distributed manner.
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Dennison, Schultz & MacDonald
Meeks Timothy H
Miller Michael G
Schunk Kohlensteofftechnik GmbH
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