Carrier for double-side polishing

Details Carrier for double-side polishing Carrier for double-side polishing

1998-06-25

2000-03-28

Breneman, Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

451 56, 451287, B24B 4918

Patent

active

060426888

ABSTRACT:
A carrier for double-side polishing, which has a polishing pad dressing function as well as a polishing function, so that it can do removal of matter stuck to polishing pads and wear correction thereof concurrently with polishing and ensure stable work polishing accuracy. A resin-coated metal or resin ring is provided around the outer periphery of a carrier portion having work retainer holes and abrasive feed holes, and projections are formed on the upper and lower surfaces of the ring. The projections are cylindrical, triangular pyramidal, quadrangular pyramidal or conical, or they may be irregular projections formed by blasting.

REFERENCES:
patent: 5364655 (1994-11-01), Nakamura et al.
patent: 5707492 (1998-01-01), Stager et al.

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