Carrier for cleaning and etching wafers

Details Carrier for cleaning and etching wafers Carrier for cleaning and etching wafers

1982-08-13

1985-02-19

Watson, Robert C.

Work holders

Holder mounted for movement

Relative to a station

235380, B23Q 104

Patent

active

045000808

ABSTRACT:
A carrier supports a single lot of prescribed sheets of semiconductor wafers so as to transfer the semiconductor wafers from one processing step to another processing step in their cleaning and etching processing. The carrier, or a container for the carrier, includes an information member holder and an information member detachably supported by the holder. An information member includes a semiconductor chip which constitutes a microprocessor and memory. The above carrier can bring about numerous merits which include:

REFERENCES:
patent: 1506926 (1924-09-01), Gunter
patent: 3868057 (1975-02-01), Chavez
patent: 3934122 (1976-01-01), Riccitelli
patent: 4204113 (1980-05-01), Giraud et al.

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