Carrier for a semiconductor wafer and use of the carrier

Details Carrier for a semiconductor wafer and use of the carrier Carrier for a semiconductor wafer and use of the carrier

1997-06-24

1999-06-15

Kramer, Dean

Handling: hand and hoist-line implements

Contact lens applicator

294902, 414941, 118500, B25J 1500

Patent

active

059114614

ABSTRACT:
A carrier for a semiconductor wafer has at least three protrusions on which he edge of the semiconductor wafer is supported so that the semiconductor wafer is positioned essentially horizontal. The carrier does not make contact with the front side and the rear side of the semiconductor wafer. The protrusions are shaped so that the edge of the semiconductor wafer is supported exclusively below an imaginary central plane in the center between the front side and the rear side of the semiconductor wafer. The carrier is preferably used in the treatment of semiconductor wafers at temperatures of at least 200.degree. C.

REFERENCES:
patent: 3469686 (1969-09-01), Gutsche et al.
patent: 4228902 (1980-10-01), Schulte
patent: 5061144 (1991-10-01), Akimoto et al.
patent: 5401692 (1995-03-01), Laue et al.
patent: 5445486 (1995-08-01), Kitayama et al.
patent: 5489192 (1996-02-01), Taniguchi
patent: 5669644 (1997-09-01), Kaihotsu et al.
patent: 5727990 (1998-03-01), Hasegawa et al.
patent: 5755469 (1998-05-01), Choi et al.

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