Carrier cleaning and drying apparatus

Details Carrier cleaning and drying apparatus Carrier cleaning and drying apparatus

1989-09-05

1990-07-17

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

134 99, 134144, 134153, B08B 302

Patent

active

049414895

ABSTRACT:
A carrier cleaning and drying apparatus for cleaning and drying a wafer processing carrier has a cleaning tank for accommodating the carrier and a high-pressure injection nozzle disposed in an upper portion of the cleaning tank and for injecting a pressurized cleaning solution. This high-pressure injection nozzle is moved within a plane and the cleaning solution is injected at high pressure therefrom, thereby removing dust adhering to the inner and outer surfaces of the carrier by means of the force of injection. A supporting and rotating mechanism portion is also provided which, during cleaning of the carrier, swings the carrier at a predetermined angle, and, after cleaning, effects drying by spinning the carrier at high speed.

REFERENCES:
patent: 3411518 (1968-11-01), Fisher et al.
patent: 3446219 (1969-05-01), Hilleman
patent: 3624750 (1971-11-01), Peterson
patent: 3769992 (1973-11-01), Wallestad
patent: 3799178 (1974-03-01), Anderson et al.
patent: 4165994 (1979-08-01), Jackson
patent: 4299245 (1981-11-01), Clapper

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