Carbonaceous protective films and method of depositing the same

Details Carbonaceous protective films and method of depositing the same Carbonaceous protective films and method of depositing the same

1989-07-17

1993-08-24

Beck, Shrive

Coating processes

Electrical product produced

Carbon coating

427249, C23C 1600

Patent

active

052387054

ABSTRACT:
Diamond films are formed by chemical vapor reation. Nitrogen or halogen compound gas is inputted to the reaction chamber together with a reactive gas of hydrocarbon. The resistivity, transparency and hardness of the deposited films can be controlled by adjusting the introduction rate of the halogen or nitrogen.

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patent: 4869923 (1989-01-01), Yamazaki
patent: 4871581 (1989-10-01), Yamazaki
L. Mackenzie Miall, "A New Dictionary of Chemistry", Interscience Publishers, Inc., 1961, p. 379.

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