Chemistry of inorganic compounds – Carbon or compound thereof – Elemental carbon
Patent
1991-11-12
1993-12-14
Kunemund, Robert
Chemistry of inorganic compounds
Carbon or compound thereof
Elemental carbon
423446, 427450, 427577, 204173, 156610, 156DIG68, B05D 512
Patent
active
052700291
ABSTRACT:
A carbon film consisting of diamond powder contains nitrogen and boron therein. In the light of the addition of nitrogen and boron, the diamond is fabricated without growing defects and the film make in sturdy mechanical contact with the underlying surface.
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Marwec et al., "Electron Spectroscopy of Ion Beam and Hydrocarbon Plasma Generated Diamond Like Carbon Films", J. Vac. Sci. Technol. 18(2) Mar. 1981, pp. 226-228.
Kunemund Robert
Semiconductor Energy Laboratory Co,. Ltd.
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