Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate
2011-04-19
2011-04-19
Ghyka, Alexander G (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
C257SE21521, C977S800000
Reexamination Certificate
active
07927992
ABSTRACT:
Under one aspect, a method of cooling a circuit element includes providing a thermal reservoir having a temperature lower than an operating temperature of the circuit element; and providing a nanotube article in thermal contact with the circuit element and with the reservoir, the nanotube article including a non-woven fabric of nanotubes in contact with other nanotubes to define a plurality of thermal pathways along the article, the nanotube article having a nanotube density and a shape selected such that the nanotube article is capable of transferring heat from the circuit element to the thermal reservoir.
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Bertin Claude L.
Segal Brent M.
Ward Jonathan W.
Ghyka Alexander G
Nantero Inc.
Nikmanesh Seahvosh J
Wilmer Cutler Pickering Hale and Dorr LLP
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