Carbon nanotube emitter with triode structure

Details Carbon nanotube emitter with triode structure Carbon nanotube emitter with triode structure

1999-09-01

2000-05-16

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, H01J 902

Patent

active

060629312

ABSTRACT:
An improved cold cathode emitter based on carbon nanotubes has been developed by inserting into the conventional process an extra step in which the diameter of the gate aperture is temporarily reduced by means of a conformally deposited sacrificial layer. This reduced diameter aperture is then used as a mask for the deposition of the catalytic layer. The latter is then converted to a discontinuous layer either by selective etching or by heating until agglomeration occurs. The sacrificial layer is removed, following which carbon nanotubes are grown upwards from the catalytic layer in the normal manner. Because of the greater distance between the tubes and the gate aperture that this process provides, a more reliable product is obtained.

REFERENCES:
patent: 5458520 (1995-10-01), DeMercurio et al.
patent: 5679044 (1997-10-01), Meyer et al.
patent: 5779514 (1998-07-01), Cheng et al.
patent: 5973444 (1999-10-01), Xu et al.
Huang et al., "Growth of Highly Oriented Carbon Nanotubes by Plasme -Enhanced Hot Filament Chemical Vapor Deposition", Applied Physics Letters, vol. 73, No. 26, Dec. 1998, pp. 3845-3847.
Shoushau Fan et al., "Self-Oriented Regular Arrays of Carbon Nanotubes and their Field Emission Propertics", Science, vol. 283, Jan. 22, 1999, pp. 512-514.

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