Carbon nanotube circuit component structure

Details Carbon nanotube circuit component structure Carbon nanotube circuit component structure

2011-08-02

2011-08-02

Patel, Nimeshkumar D (Department: 2879)

Electric lamp and discharge devices

Electrode and shield structures

C257S758000, C257S211000

Reexamination Certificate

active

07990037

ABSTRACT:
The present invention proposes a circuit component structure, which comprises a semiconductor substrate, a fine-line metallization structure formed over the semiconductor substrate and having at least one metal pad, a passivation layer formed over the fine-line metallization structure with the metal pads exposed by the openings of the passivation layer, at least one carbon nanotube layer formed over the fine-line metallization structure and the passivation layer and connecting with the metal pads. The present invention is to provide a carbon nanotube circuit component structure and a method for fabricating the same, wherein the circuit of a semiconductor element is made of an electrically conductive carbon nanotube, and the circuit of the semiconductor element can thus be made finer and denser via the superior electric conductivity, flexibility and strength of the carbon nanotube.

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