Chemistry of inorganic compounds – Carbon or compound thereof – Elemental carbon
Reexamination Certificate
2006-12-12
2006-12-12
Cooke, Colleen P. (Department: 1754)
Chemistry of inorganic compounds
Carbon or compound thereof
Elemental carbon
C423S447300, C423S447100, C977S742000, C977S840000, C977S842000
Reexamination Certificate
active
07147831
ABSTRACT:
A carbon nanotube-based device includes a substrate (10); a catalyst layer (13) disposed on the substrate, the catalyst layer comprising a number of nano-sized catalyst particles (131), a size of the catalyst particles decreasing along a given direction; and an array of aligned carbon nanotubes (14) extending from the catalyst layer in an arc toward the given direction. A method for making the carbon nanotube based device includes the steps of: (1) providing a substrate; (2) forming a catalyst layer on the substrate, a thickness of the catalyst layer decreasing along a given direction; (3) annealing the treated substrate in air to form nano-sized catalyst particles; (4) introducing a carbon source gas; and (5) forming an array of carbon nanotubes extending from the catalyst particles using a chemical vapor deposition method.
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Fan Shou-shan
Liu Liang
Chung Wei Te
Cooke Colleen P.
Hon Hai - Precision Ind. Co., Ltd.
Stadler Rebecca M.
Tsinghua University
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