Chemistry of inorganic compounds – Carbon or compound thereof – Elemental carbon
Reexamination Certificate
2005-11-10
2010-06-08
Vanoy, Timothy C (Department: 1793)
Chemistry of inorganic compounds
Carbon or compound thereof
Elemental carbon
C423S447400
Reexamination Certificate
active
07731930
ABSTRACT:
A method for manufacturing a carbon nanotube assembly including the steps of: forming metallic fine particles, having a predetermined particle diameter, on a substrate; heating the metallic fine particles to a predetermined temperature of 300° C. to 400° C. in a reducing atmosphere to cause reduction at surfaces thereof; heating the metallic fine particles to a predetermined reaction temperature in a reactor; and introducing an organic compound vapor into the reactor to grow carbon nanotubes on the metallic fine particles in such a way that a time during which the temperature of the metallic fine particles exceeds 450° C. is 600 seconds or fewer for the period of time before the growth of the carbon nanotubes is started after the heating of the metallic fine particles is started.
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Shinohara Kiyoaki
Taki Yusuke
Hou Michelle
Nikon Corporation
Oliff & Berridg,e PLC
Vanoy Timothy C
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