Carbon film oxidation for free-standing film formation

Details Carbon film oxidation for free-standing film formation Carbon film oxidation for free-standing film formation

1986-07-07

1987-11-10

Thurlow, Jeffery

Plastic and nonmetallic article shaping or treating: processes

Carbonizing to form article

In specific atmosphere

1566591, 156664, 156666, 264 81, 264 82, 264 83, 264139, 264104, 264105, 264317, 264332, 264338, B29C 4122

Patent

active

047056592

ABSTRACT:
A process is disclosed for fabricating a free-standing thin or thick film structure. One embodiment of the process includes the steps of providing a substrate of a first refractory material, forming a layer of carbon on the substrate, and depositing a film of a second refractory material on top of the layer of carbon. This sandwich structure is heated in an oxidizing ambient to cause the oxidation of the carbon layer leaving the second refractory material as a free-standing film.

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patent: 4410471 (1983-10-01), Gurtler et al.
patent: 4500483 (1985-02-01), Veltri et al.
patent: 4552615 (1985-11-01), Amendola et al.

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