Carbon dioxide precision cleaning system for cylindrical substra

Details Carbon dioxide precision cleaning system for cylindrical substra Carbon dioxide precision cleaning system for cylindrical substra

1993-12-03

1995-07-11

McFarlane, Anthony

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134 34, 451 53, 451 7, B08B 700

Patent

active

054317401

ABSTRACT:
An apparatus for cleaning cylindrical surfaces includes a plurality of cleaning stations. Each cleaning station is designed to receive a substrate and includes a plurality of nozzles. The inlet end of each nozzle is connected to a source of liquid Carbon Dioxide, and the outlet end of each nozzle is connected to one end of a respective Carbon Dioxide expansion chamber. Liquid Carbon dioxide leaving each nozzle is converted to solid Carbon Dioxide in the corresponding expansion chamber. The other end of each Carbon Dioxide expansion chamber is coupled to a respective funnel which is, in turn, connected to a dispersing saddle. The dispersing saddles disperse the stream of solid Carbon Dioxide particles leaving each funnel and direct these particles to the substrate surface. The dispersing saddles are placed such that the entire circumference of the substrate surface is enveloped within the various streams of solid Carbon Dioxide particles. In addition, the apparatus may include a source of a dry nonreactive gas which is introduced into each stream of solid Carbon Dioxide particles in order to reduce condensation on the surface from the surface of the substrate and to further direct each stream of solid Carbon Dioxide particles to the substrate surface.

REFERENCES:
patent: 4617064 (1986-10-01), Moore
patent: 5108512 (1992-04-01), Goffnett et al.
patent: 5125979 (1992-06-01), Swain et al.
patent: 5147466 (1992-09-01), Ohmori et al.
patent: 5226969 (1993-07-01), Watanabe et al.

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