Capture layer and method for delayed entrapment of contaminant p

Details Capture layer and method for delayed entrapment of contaminant p Capture layer and method for delayed entrapment of contaminant p

1993-04-01

1994-05-24

Thomas, Alexander S.

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428913, 427164, 427331, A47G 112

Patent

active

053147286

ABSTRACT:
A capture layer is disclosed for delayed entrapment of contaminant particles that may accumulate on the inner surface of a pellicle during or after pellicle fabrication. The capture layer is formed of a delayed curable material that resides on the inner surface of the pellicle, which pellicle includes a pellicle membrane and a peripheral pellicle frame. The material may reside on the underside of the membrane and the inside surface of the frame. In one embodiment the material is a gel and is formed from an epoxy-based mixture. A pellicle system is also disclosed which includes the capture layer. A method for delayed entrapment of such contaminant particles is also disclosed which involves the forming of a time-delay-curable capture layer on the inner side of a pellicle.

REFERENCES:
patent: 3500129 (1970-03-01), Jowitt
patent: 3765941 (1973-10-01), Gordon
patent: 4470508 (1984-09-01), Yen
patent: 4697701 (1987-10-01), Ying
Japanese Pat. Appl. Pub. No. (A) Feb. 1989-48062.

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