Capped microsensor

Details Capped microsensor Capped microsensor

2006-01-17

2006-01-17

Williams, Hezron (Department: 2856)

Measuring and testing

With fluid pressure

Leakage

C073S052000

Reexamination Certificate

active

06986278

ABSTRACT:
A capped microsensor is described. It is suggested that a current conductor, positioned in the cavity and having at least two voltage taps, be provided, this configuration being used for seal testing, e.g., during quality control, by detecting at least one thermodynamic variable of a gaseous medium present inside the cavity via this configuration.

REFERENCES:
patent: 4726233 (1988-02-01), Eckardt et al.
patent: 6638784 (2003-10-01), Bartlett et al.
patent: 2003/0033861 (2003-02-01), Eisenschmid et al.
patent: 101 23 920 (2002-11-01), None
“The NanoPirani—Presumably the World's Smallest Pressure Sensor”, Reyntjens, S., De Bruyker, D., Puers, R., Transducers'01, Eurosensors XV, 11th International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers/Obermeier, E., Berlin, Germany, Germany: Springer-Verlag, vol. 1, 2001, 2 vol., 1807 pp. 490-493, vol. 1.*.

Affiliated with

Also associated with

Rating

Capped microsensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capped microsensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capped microsensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3565392