Capillary tubing

Details Capillary tubing Capillary tubing

2007-05-15

2007-05-15

Berman, Jack (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S492200, C378S119000, C378S120000, C378S169000, C378S111000, C239S136000, C239S337000, C239S373000

Reexamination Certificate

active

10522026

ABSTRACT:
A method and an arrangement for generating x-ray or EUV radiation are disclosed. Target material is supplied from a container for target material to a jet-forming orifice in an interaction chamber by means of a flexible capillary tubing of considerable length, wherein the orifice is an integral part of the capillary tubing. A jet formed by urging target material through the orifice is made to interact with a beam of energy, thus producing a radiating plasma emitting the desired electromagnetic radiation. The use of a flexible capillary tubing for supplying target material from a source of target material to an orifice, which is integrated with the tubing, within an interaction chamber, in order to form therein a jet of target material for interaction with an energy beam to generate x-ray or EUV radiation, is also disclosed.

REFERENCES:
patent: 4723262 (1988-02-01), Noda et al.
patent: 6002744 (1999-12-01), Hertz et al.
patent: 6760406 (2004-07-01), Hertz et al.
patent: 6933515 (2005-08-01), Hartlove et al.
patent: WO 99/51356 (1999-10-01), None
O. Hemberg et al., “Target Analysis of Laser-Plasma Droplet-Target System”, Proc. SPIE vol. 4144 (2000) pp. 38 to 42.

Affiliated with

Also associated with

Rating

Capillary tubing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capillary tubing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capillary tubing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3729550