Metal fusion bonding – Means to apply vibratory solid-state bonding energy to work
Patent
1997-08-21
1999-05-18
Heinrich, Samuel M.
Metal fusion bonding
Means to apply vibratory solid-state bonding energy to work
228 55, H01L21/00;21/607
Patent
active
059042869
ABSTRACT:
An ultrasonic horn used in, for instance, wire bonding having a structure for holding a capillary therein, the capillary holding structure including an external screw section which protrudes from the end surface of the horn and a spacer mount which is larger in diameter than the external screw section and formed on the root portion of the external screw section. A ring-form spacer is mounted on the spacer mount, and the spacer has a shape that prevents the rotation of the spacer on the spacer mount and is formed so that its vertically opposing end portions are positioned above and below the capillary attachment hole, and the length between the horizontally opposing end portions of the spacer is shorter than the length of the vertically opposing end portions. In addition, a tightening member, such as a nut, is screwed on the external screw section so that a ring-form pressing part which is formed on the tightening member presses only against the vertically opposing end portions of the spacer, thus holding the capillary on the horn.
REFERENCES:
patent: 5368216 (1994-11-01), Sakakura et al.
patent: 5469011 (1995-11-01), Safabakhsh
patent: 5699951 (1997-12-01), Miyoshi
patent: 5702049 (1997-12-01), Biggs et al.
patent: 5829663 (1998-11-01), Khelemsky et al.
Akiike Tadashi
Kawagishi Minoru
Sakakura Mitsuaki
Heinrich Samuel M.
Kabushiki Kaisha Shinkawa
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