Chemical apparatus and process disinfecting – deodorizing – preser – Control element responsive to a sensed operating condition
Reexamination Certificate
2007-07-10
2007-07-10
Ludlow, Jan M. (Department: 1743)
Chemical apparatus and process disinfecting, deodorizing, preser
Control element responsive to a sensed operating condition
C400S124290, C400S124300, C400S124310, C400S124320
Reexamination Certificate
active
10213059
ABSTRACT:
Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
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Chow Eugene M.
De Bruyker Dirk
Fork David K.
Hantschel Thomas
Rosa Michel A.
Bever Patrick T.
Bever Hoffman & Harms LLP
Ludlow Jan M.
Palo Alto Research Center Incorporated
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