Capacity load type probe, and test jig using the same

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

active

10503669

ABSTRACT:
A plurality of probes such as a signal probe (3) and a power supply probe (4) are provided into a metal block (1) so as to penetrate. Each of the probes has a movable pin (11). A tip of the movable pin is projecting from one surface of the metal block (1). And a projection length of the tip is variable. A DUT20is pressed onto the surface of the metal block (1) to contact between electrode terminals (21to24) and tips of the probes to test characteristics of the DUT. At least one of the probes is capacity loaded probe having a capacitor by providing a dielectric layer and a metal film to peripheral of the probe. As a result, noise can be removed reliably. Additionally, when the capacity loaded probe is used as the power supply probe, a voltage drop is reduced at the power supply terminal in a case of change of the output.

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International Search Report for PCT/JP03/01277 mailed on May 20, 2003.
European Search Report, Application No. 03703239.8-2216 PCT/JP0301277, dated Aug. 29, 2005.

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