Capacitors and interconnect lines for use with integrated circui

Details Capacitors and interconnect lines for use with integrated circui Capacitors and interconnect lines for use with integrated circui

1994-02-01

1996-04-16

Walberg, Teresa J.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361313, 361322, 361330, 257532, H01G 4008

Patent

active

055088813

ABSTRACT:
A multi-region material structure and process for forming capacitors and interconnect lines for use with integrated circuits provides (1) capacitor first or bottom electrodes comprising a transition-metal nitride; (2) a capacitor dielectric comprising a transition-metal oxide; (3) capacitor second or top electrodes comprising a transition-metal nitride, a metal or multiple conductive layers; (4) one or more levels of interconnect lines; (5) electrical insulation between adjacent regions as required by the application; and (6) bonding between two regions when such bonding is required to achieve strong region-to-region adhesion or to achieve a region-to-region interface that has a low density of electrical defects. The process for forming the material structures involves formation of the capacitor dielectric on the first electrode surfaces by conversion of a conductive transition-metal nitride to an insulating transition-metal oxide and formation of low-defect-density interfaces between capacitor second electrodes and the capacitor dielectric.

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