Capacitor with obstacle between side surfaces of lower electrode

Details Capacitor with obstacle between side surfaces of lower electrode Capacitor with obstacle between side surfaces of lower electrode

1998-08-04

2000-07-18

Reichard, Dean A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361311, 361329, H01G 4228, H01G 406

Patent

active

060915994

ABSTRACT:
An obstacle is opposed to a lower electrode of a metal-insulator-metal capacitor so as to form a gap therebetween, thereafter, insulating material is deposited so as to fill the gap and form a dielectric layer of the metal-insulator-metal capacitor; even if the deposition does not achieve a conformal step coverage, the insulating material in the gap surely isolates the lower electrode from the upper electrode, and the lower electrode is never short-circuited with the upper electrode.

REFERENCES:
patent: 4453199 (1984-06-01), Ritchie et al.
patent: 4636833 (1987-01-01), Nishioka et al.
patent: 5491102 (1996-02-01), Desu et al.
patent: 5590017 (1996-12-01), Kelso
patent: 5717234 (1998-02-01), Si et al.

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