Capacitor with nanotubes and method for fabricating the same

Details Capacitor with nanotubes and method for fabricating the same Capacitor with nanotubes and method for fabricating the same

2005-06-07

2008-12-09

Ha, Nguyen T (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S321200, C361S301100, C361S311000, C361S313000, C361S306100, C438S455000, C438S459000, C438S736000, C438S738000

Reexamination Certificate

active

07463476

ABSTRACT:
A capacitor with nanotubes and a method for fabricating the same are provided. The capacitor includes: a lower electrode including a patterned conductive layer and a plurality of nanotubes formed on the patterned conductive layer in the shape of whiskers without using a catalytic layer; a dielectric layer formed on the lower electrode; and an upper electrode formed on the dielectric layer. The method includes the steps of: forming a conductive layer for forming a lower electrode; forming a nanotube array including a plurality of nanotubes formed on the conductive layer without using a catalytic layer; forming a dielectric layer on the nanotube array; and forming an upper electrode on the dielectric layer.

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