Capacitor type acceleration sensor

Details Capacitor type acceleration sensor Capacitor type acceleration sensor

1995-08-18

1997-01-28

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351432, G01P 1500, G01P 15125

Patent

active

055979564

ABSTRACT:
A capacitor type acceleration sensor is disclosed. In this sensor, an acceleration sensing element 1 has two variable capacitors C1 and C2 that are constructed with a couple of fixed electrodes and a movable electrode located between the fixed electrodes. Electrostatic power generation/feedback means 15 applies to the fixed- and movable-electrode pairs such an electrostatic power as to set the movable electrode at a preset reference position in accordance with the output signal of capacitance-difference detector means 10. The electrostatic power is outputted as an output signal of the capacitor type acceleration sensor. In the capacitor type acceleration sensor, another fixed capacitor Cx of which the capacitance value Cx is larger than the maximum capacitance-difference between the variable capacitors C1 and C2 of which the capacitance values vary in accordance with an acceleration, is connected in parallel with the variable capacitor C2. The capacitance (C2+Cx) is larger than the capacitance of the variable capacitor C1, irrespective of the direction of acceleration.

REFERENCES:
patent: 3662595 (1972-05-01), Hurlbert et al.
patent: 5311140 (1994-05-01), Permuy
patent: 5325065 (1994-06-01), Bennett et al.
patent: 5345824 (1994-09-01), Sherman et al.
patent: 5465604 (1995-11-01), Sherman
European Search Report on European Patent Application No. EP-95-11 3187; Dec. 27, 1995.

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