Capacitor structure

Details Capacitor structure Capacitor structure

2005-04-26

2005-04-26

Dinkins, Anthony (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S329000, C257S306000, C257S532000, C438S253000

Reexamination Certificate

active

06885542

ABSTRACT:
A capacitor is formed with a substantially concave shape and having optional folded or convoluted surfaces. The concave shape optimizes surface area within a small volume and thereby enables the capacitor to hold a significant charge so as to assist in increased miniaturization efforts in the microelectronic field. The capacitor is fabricated in microelectronic fashion consistent with a dense DRAM array. Methods of fabrication include stack building with storage nodes that extend above a semiconductor substrate surface.

REFERENCES:
patent: 6242777 (2001-06-01), Mano et al.
patent: 6459116 (2002-10-01), Wu et al.
patent: 6784519 (2004-08-01), Iwamoto et al.

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