Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1988-12-19
1991-12-24
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 725, G01R 3102
Patent
active
050756214
ABSTRACT:
A probe for testing integrated circuit wafers is disclosed herein. The probe comprises a ceramic body having an extended voltage contact on the upper most surface, an extended ground contact on the lower most surface, sets of interdigitated internal metallic plates, one set of plates beginning at the voltage contact and extending part way into the body and the other set of plates beginning at the ground contact and extending interdigitally into the body between the other set of plates, but separated therefrom by the material of the body and a needle-like member contacts which connected to one of the needle-like members has a cantilevered tip adapted to contact a semiconductor circuit interconnection pad.
REFERENCES:
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patent: 4161692 (1979-07-01), Tarzwell
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patent: 4617609 (1986-10-01), Utner et al.
patent: 4623839 (1986-11-01), Garretson et al.
patent: 4638402 (1987-01-01), Lim et al.
patent: 4791363 (1988-12-01), Logan
IBM TDB, vol. 18, No. 11, Apr. 1976, pp. 3629-3630, "Bypass Capacitor for Chip Probe", A. Bry et al.
IBM TDB, vol. 18, No. 3, Aug. 1975, pp. 749-750, "High-Performance AC Chip Contactor", R. M. Morton et al.
Eisenzopf Reinhard J.
International Business Machines - Corporation
Thornton Francis J.
Urban Edward
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