Capacitor of a semiconductor device

Details Capacitor of a semiconductor device Capacitor of a semiconductor device

1996-11-04

1997-09-16

Crane, Sara W.

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

257774, 257306, H01L 2941

Patent

active

056684126

ABSTRACT:
A semiconductor device wherein an effective surface area is secured within a contact hole and wherein a storage electrode with rectangular corners is exactly patterned. The effective surface area within a contact hole can be obtained by overlapping the storage electrode contact hole with a portion of the storage electrode, so as to ensure more capacitance. Rounding of the corner of the rectangular storage electrode, which directs the resulting storage electrode to diminish in effective surface area, can be prevented by the different position of the storage electrode mask at the contact hole from one row or column to next, so as to make no difference between the patterned storage electrode and the designed one.

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patent: 5341026 (1994-08-01), Harada et al.
patent: 5442238 (1995-08-01), Takada
patent: 5444020 (1995-08-01), Lee et al.
patent: 5471094 (1995-11-01), Lien
patent: 5514911 (1996-05-01), Kim
patent: 5525552 (1996-06-01), Huang

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