Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating selected area
Patent
1990-10-11
1992-08-25
Niebling, John
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Coating selected area
361313, 361322, 205175, 205328, 205332, C25D 1112
Patent
active
051416034
ABSTRACT:
Capacitor structure capable of achieving increased energy storage density is disclosed together with a fabrication sequence for the capacitor and its anodic oxide dielectric material. Soft porous aluminum oxide which has been formed in a first anodization step and has been densified or transformed to hard barrier oxide in a second anodization step is preferred for the capacitor dielectric material. The first anodization may be performed in a sulfuric acid electrolyte while the second anodization may be performed in a boric acid electrolyte. The boric acid may be diluted with ethylene glycol. The disclosed capacitor is fabricated on a silicon wafer substrate.
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Davidson Jimmy L.
Dickey John R.
Tzeng Yonhua
Hollins Gerald B.
Leader William T.
Niebling John
Singer Donald J.
The United States of America as represented by the Secretary of
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