Capacitor having low resistance electrode including a thin...

Details Capacitor having low resistance electrode including a thin... Capacitor having low resistance electrode including a thin...

2007-01-30

2007-01-30

Thomas, Eric W. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S311000, C257S303000

Reexamination Certificate

active

10922435

ABSTRACT:
A capacitor is provided having a first electrode including a layer of low-resistance non-silicon material. The capacitor includes a layer of silicon formed on the low-resistance material layer and a capacitor dielectric formed on the layer of silicon. A second electrode is formed on the capacitor dielectric, the second electrode including at least a material selected from the group consisting of metals, low-resistance compounds of metals, and deposited semiconductors having a dopant concentration of at least 1×1017cm−3.

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